ABSTRACT

This chapter deals with both conventional and unconventional micromachining processes. The conventional micromachining consists of microturning, micromilling, microdrilling, and micro grinding. Machining in conventional micromachining processes is based on frictional shear between tool and workpiece; these processes are miniaturization of existing conventional methods for microlevel applications. The primary requirement of conventional processes is that the hardness of tool material must be greater than the workpiece material because the cutting principle is mechanical wear. The collection of machining processes that utilize the energy source for material removal of complicated materials are named non-conventional machining methods. Ultrasonic micromachining is a type of nonconventional machining method most widely employed to machine very hard and brittle materials by using mechanical action between abrasive and the workpiece surface. Oscillating system consists of an ultrasonic transducer, ultrasonic horn, and a coupler. The ultrasonic transducer is a major component of the oscillating system setup.