ABSTRACT

An excellent introduction to monolithic microwave integrated circuit (MMIC) technology is presented by Robert Pucel in 1981 [1]. Pucel went on to assemble a collection of papers on the subject in which he states in the introduction [2]:

“the monolithic approach is an approach wherein all active and passive circuit elements and interconnections are formed, in situ on or within a semi-insulating semi-conductor substrate by a combination of deposition schemes such as epitaxy, ion implantation, sputtering, and evaporation.”