ABSTRACT
This chapter provides an overview of compliant substrate, its theo-
retical concept, and practical implementation methods. The concept
was originally proposed to offer a versatile technology beyond the
limitation of lattice mismatch that has been encountered in most
heterostructures. Different fabrication schemes to prepare com-
pliant substrates in various materials are reviewed and assessed.
Although there have been plenty of evidence showing reduction
of threading dislocations (TDs) using a compliant substrate, its
physical origin is still under debate.
