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Book

3D Integration for VLSI Systems

Book

3D Integration for VLSI Systems

DOI link for 3D Integration for VLSI Systems

3D Integration for VLSI Systems book

3D Integration for VLSI Systems

DOI link for 3D Integration for VLSI Systems

3D Integration for VLSI Systems book

Edited ByChuan Seng Tan, Kuan-Neng Chen, Steven J. Koester
Edition 1st Edition
First Published 2011
eBook Published 7 December 2011
Pub. Location New York
Imprint Jenny Stanford Publishing
DOI https://doi.org/10.1201/b11167
Pages 350
eBook ISBN 9780429067464
Subjects Engineering & Technology
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Koester, S.J., Chen, K.-N., & Tan, C.S. (Eds.). (2011). 3D Integration for VLSI Systems (1st ed.). Jenny Stanford Publishing. https://doi.org/10.1201/b11167

ABSTRACT

Three-dimensional (3D) integration is identified as a possible avenue for continuous performance growth in integrated circuits (IC) as the conventional scaling approach is faced with unprecedented challenges in fundamental and economic limits. Wafer level 3D IC can take several forms, and they usually include a stack of several thinned IC layers th

TABLE OF CONTENTS

chapter 1|26 pages

3D Integration Technology – Introduction and Overview

chapter 2|16 pages

A Systems Perspective on 3D Integration: What is 3D? And What is 3D Good For?

chapter 3|28 pages

Wafer Bonding Techniques

chapter 4|20 pages

TSV Etching

chapter 5|30 pages

TSV Filling

chapter 6|18 pages

3D Technology Platform: Temporary Bonding and Release

chapter 7|14 pages

3D Technology Platform: Wafer Thinning, Stress Relief, and Thin Wafer Handling

chapter 8|22 pages

Advanced Die-to-Wafer 3D Integration Platform: Self-Assembly Technology

chapter 9|30 pages

Advanced Direct Bond Technology

chapter 10|26 pages

Surface Modification Bonding at Low Temperature for Three-Dimensional Hetero-Integration

chapter 11|32 pages

Through Silicon Via Implementation in CMOS Image Sensor Product

chapter 12|34 pages

A 300-mm Wafer-Level Three-Dimensional Integration Scheme Using Tungsten Through-Silicon Via and Hybrid Cu-Adhesive Bonding

chapter 13|16 pages

Power Delivery in 3D IC Technology with a Stratum Having an Array of Monolithic DC-DC Point-of-Load (PoL) Converter Cells

chapter 14|22 pages

Thermal-Aware 3D IC Designs

chapter 15|16 pages

3D IC Design Automation Considering Dynamic Power and Thermal Integrity

chapter 16|16 pages

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