chapter  3
14 Pages

Clean Rooms

WithBéla G. Lipták

Clean rooms are used for experimental studies of a wide variety. Testing and analysis laboratories, used in the medical, military, and processing industries, are all designed to operate as clean rooms. The optimization of clean rooms, therefore, is an important subject to many industries. The production of semiconductors is one of several processes done in a clean-room environment. Optimization of the clean-room control system will drastically reduce both the energy cost of operation and the cost of manufacturing of off-spec products. A semiconductor manufacturing clean room has rows of workstations.