ABSTRACT
In this paper, we address the problem of estimating the circularity of the pore structures based on an image processing technique. In a PS chip, adjacent pores may merge to form a connected pattern of complex shape. Based on some geometric properties of a digital circle, we propose a segmentation technique to isolate each of the pores from the given SEM image. Once the boundary of a pore is extracted, a circlefitting algorithm is deployed to determine a best fit followed by estimating the deviation from circularity by computing the Hausdorff distance (Rucklidge
1997) between the actual pore boundary and the fitted circle.
