ABSTRACT
As follows from the title of this chapter, the main elements of the considered mass-sensitive humidity sensors are the membrane (diaphragm) and microcantilevers. This chapter gives a detailed description of these sensors, including consideration of the configuration of sensors, modes of operation, sorption models, and methods of deflection detection. Humidity-sensitive materials suitable for use in such sensors are also discussed. Considerable attention is given to the consideration of examples of humidity sensors implementation. In particular, a description is given of the functionalization methods and approaches used for the development of capacitive humidity sensors and piezoresistive humidity sensors. Advantages and disadvantages of cantilever and membrane-based humidity sensors are also analyzed. It is shown that the sensors under consideration can have very high sensitivity.
