ABSTRACT
The integration of sensors directly on flexible plastic foils is a new trend in humidity sensor design. The flexibility of such sensors and their simplified processing, targeting the production on a large area using roll-to-roll and printed electronics processing, bring new opportunities and reduce several technical limitations that characterize the production processes of conventional microelectronics. This chapter analyzes the features of such sensors, compares the parameters of materials that can be used as flexible substrates, and describes the techniques used in their manufacture. Performances of humidity sensors on flexible substrates, such as capacitive humidity sensors, resistive humidity sensors, and a multiparameter sensing platform, are also discussed in this chapter. It is shown that paper-based humidity sensors can also be developed.
