ABSTRACT
The mapping technique developed slowly but with the advent of x-ray energy-dispersive spectrometry (EDS) in the early 1970s, qualitative multi-element mapping became common. While EDS mapping is common, the relatively poor signal to background in the EDS spectrum and associated peak overlap problems mean that wavelength-dispersive spectrometry is the best technique when light elements, or relatively small amounts of material, are being sought. The best option for light element thin specimen microanalysis is to detect and image the energy-loss electrons using electron energy-loss spectrometry. Microanalysis in the materials sciences aims to relate composition variations to the properties of the material, often revealed through the defects imaged in the microscope. There are fundamental physical limitations that restrict x-ray microanalysis to the micron level in bulk specimens. Possible signals for analysis include x-rays, Auger electrons and energy-loss electrons.
