ABSTRACT
Electron energy loss spectroscopy, energy-dispersive X-ray microanalysis Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS) have been developed for the determination of the chemical composition of thin films and surfaces of materials. However, very few comparisons have been made of the results of analyses made using different techniques. The programs aqua for Auger Quantification and quax for Quantitative XPS have been developed at the University of Dundee to enable the rapid determination of surface composition by AES and XPS using iterative procedures from raw spectral data. Quantitative surface analysis by XPS or AES of a matrix containing a number of elements is obtained by measuring the X-ray photoelectron or Auger electron intensities. A useful feature of the aqua/quak system is its ability to investigate the effects of various matrix correction attempts on surface quantification results.
