ABSTRACT
Organic materials applied in sensors are mainly polymers; however, lipids, enzymes, and biochemical compounds have also found an expanding use recently. This chapter discusses the technologies of inorganic device parts commonly used in sensorics, and describes the special techniques for forming and shaping polymer foils and films. Several film deposition and related processes that had been used for the fabrication of devices based on inorganic materials could successfully be adopted for making polymer films, sheets, and fibres. In microsensor structures, "MOSFET" devices are of great importance, and the chapter presents a survey about the MOSFET devices and their technology. The chapter also discusses those polymer processes that are compatible or easily applicable with the different inorganic sensor technologies. There are a lot of conventional coating methods such as spin coating, dipping, casting, bath immersion, and various curing technologies using ovens, hot plate, vacuum oven, conveyor belt furnace, and infrared (IR) irradiation, which are widely used in polymer film application.
