ABSTRACT
Photosensitive polyimides have their source in photosensitive polymers for microlithography and insulating polymers for microelectronic uses. The increasing demands on insulating materials for good processability with planarization, low dielectric constants for high-speed performance, and high temperature resistance make polyimides attract general interest in the field of microelectronics. This chapter provides an outline of photosensitive polymers and photoresists, and then reviews polymers for microelectronic uses such as dielectric layers, packaging application, and printed wiring boards. The sensitivity and extent of resolution of photosensitive polymers can be evaluated from a characteristic curve plotting the residual thickness of the film against irradiated energy. Polymers play a significant role in microelectronics. They are not only found in final products such as housing of components, packaging of integrated circuits (IC) chips, and intermetallic dielectric layers, but they are also used extensively in major processing steps such as resists in microlithography.
