ABSTRACT
This chapter focuses on calculation of the electron energy distribution function (EEDF) that the solution of the Boltzmann equation. Although there are a few analytical solutions to the Boltzmann equation- such as the Maxwell-Boltzmann distribution function for equilibrium conditions- a numerical solution is required for most practical situations. Of great significance for methane-hydrogen plasmas are inelastic processes. Electrons of varying energy will rotationally, vibrationally, and electronically excite atoms and molecules. Because of the strong role of vibrational losses, in contrast, the displacement of molecular hydrogen with atomic hydrogen actually causes the average energy of the EEDF to increase. The other plasma constituents gain energy through collisions with the electrons. In the presence of the electromagnetic fields, electrons will always have more energy than will the neutral species. Under typical microwave chemical vapor deposition operating conditions, collisions frequencies are relatively low and the difference in energy is appreciable.
