ABSTRACT
This chapter shows that the understanding of diamond growth process in MPACVD devices requires the development of satisfactory H2/CH4 plasma transport models which provide the estimation of species and temperatures spatial distributions in the deposition reactor. In a plasma reactor, the energy gained by the electrons from the electromagnetic field is transferred to the different modes of heavy particles and dissipated for the activation of some chemical reactions. Thermal non equilibrium leads to the distinction between the rotational-translational mode of heavy species, the vibrational mode of the molecules and the translational mode of electrons. The axisymetric geometry of the plasma reactor enables another simplification since on the reactor axis, where all the radial gradients are zero, the transport equations may be reduced and expressed in one-dimension. The shape of the spatial distribution of the absorbed microwave power distribution was simply extracted from the solution of the one dimensional wave equation.
