In tribological systems, the load transfer, relative movement, wear, corrosion, and fatigue damage initiation occur at the surface. Advances in surface coating technology can therefore have considerable impact on improving the performance of such systems and extending their useful life. The inside surface of the Sputter ion plating unit as well as all of the exposed surfaces are lined with a sheet of titanium. The sputtering action provides a surface which is free of oxides or any barrier to the coating in the chamber. Ion cleaning is essential for good coating adhesion and subsequent surface performance. In the ultrathin region, surface asperities of the mating surface break through the coating and interact with the substrate. The surface treatment shows great promise for promoting dimaond film growth on steel and other metallic surfaces. Experimental studies found that heating the substrate surface using a plasma source increased the diamond growth rate.