ABSTRACT
In this chapter, the application of TiO2 material in the field of UV sensing is studied in detail. Glancing angle deposition (GLAD) technique was employed to synthesize TiO2 nanowires (NWs) on Si <100> substrates a base pressure of ~2 × 10-−5 mbar inside the e-beam chamber. GLAD technique is one kind of physical vapor deposition (PVD) technique, where the substrate is placed at a tilted angle and the incident vapor flux thereby falls on the substrate at an angle of ~85°. During the growth process, the substrates were also rotated at a high speed (~460 rpm). The gold (Au) Schottky contact based photodetectors were also fabricated by using these samples. The devices were characterized in terms of different merits of the detectors. Finally, a comparison of the TiO2 material based photodetectors synthesized by different methods is shown in tabular form.
