ABSTRACT

This chapter introduces the nonspecialist to the capabilities of electron beam lithography (EBL) and provide practical advice for anyone planning to exploit the technology for nanobiological applications. A common approach in biological applications is to coat the substrate with a self-assembled monolayer and use the exposure process to either induce or inhibit the desired functionality. The chapter also introduces the nonspecialist to the capabilities of EBL and provide practical advice for anyone planning to exploit the technology for nanobiological applications. In the case of biological applications where patterning may be for material functionalization, chemistry, rather than lithographic performance, may dictate the material choice and tone. The chapter discusses the description of image placement and overlay and the difference between them. An example in a biological application where tight overlay may be required is the fabrication of a channel to constrain DNA, followed by the fabrication of electrodes to measure charge for reading the DNA.