ABSTRACT
Phase-shifting surface profile measurement is a very important branch in optical metrology. When compared with other surface measurement techniques, it has many unique features such as varieties of configurations, high resolution, high accuracy, good repeatability, fast measurement speed, and superior surface finish tolerance. Especially in the past several decades, with the help of digital image devices and dedicated computer software, phase-shifting images were automatically processed at high speed over a full field of view (FOV), further enabling superfast 3D measurement without scanning. This chapter covers most of the aspects related to phase-shifting systems, including system configurations, phase-shifting algorithms, modeling and calibration of phase-shifting systems, and error analysis and compensation for accuracy improvement.
