ABSTRACT

A set of overall technology requirements has been established to assess the potential of various emerging research technologies in one or two complementary functions: (1) replace CMOS with a highly scalable, high performance, low-power information processing device technology, or (2) provide a storage technology capable of scaling volatile and/or non-volatile memory technology beyond the 16 nm generation. The long-term potential of each emerging device (memory and logic) to replace ultimately scaled CMOS logic or to provide a memory device technology of increased functional density and performance is assessed with the intent to provide a technically

grounded, objective benchmarking device technologies that are foreseen for 10 nm nodes. The overall technology requirements and relevance criteria are the scalability, performance, energy efϐiciency, OFF/ON (or 1/0) ratio for memory devices, gain for logic devices, operational reliability, operational temperature, CMOS technological and architectural compatibility, 3D integration and low temperature fabrication process.