ABSTRACT
This chapter will detail the equipment and processes that have been
specifically developed for microelectromechanical systems (MEMS)
fabrication and address the issue of the relative magnitude of the
forces acting on the microstructures. MEMS devices differ from
semiconductors in that the microstructures require attention not
only to the planar or x-y dimensions but also to the z-dimension or depth. Many materials must be selected for their mechanical rather
than electrical properties.
