ABSTRACT
Abstract. It is shown that accurate 2D FOFEM developed in our institute is available for computations of lenses, deflection systems and correcting multipoles. With some limitations we calculate also spectrometers or detectors. High accuracy of computed potential allows the evaluation of aberrations from accurate ray tracing. Application of the software will be shown on the design of a low voltage electrostatic SEM with cathode lens and Wien filter, intended for detection of angular and energy distribution of low energy electrons.
