ABSTRACT
Rapid progress in instrumentation and software, combined with improved understanding of the beam-specimen interaction, has led to very significant progress in such nanoanalysis. Conventional TEM/STEM columns with Schottky sources can give a probe which has an energy spread of -0.7eV and a resolution better than 0.14nm using high angle annular dark field (HAADF) imaging. Using aberration correction and cold field emission, instruments such as SuperSTEM will soon achieve sub O.lnm HAADF resolution with a higher probe current and an energy spread of -0.3eV. Improved detectors on spectrometers and improved stability provide higher quality data and allow significantly longer acquisition times. With monochromation, sub O.leV energy resolution can be obtained, albeit with some loss of spatial resolution due to reduced probe current. Electron energy loss near edge structure (ELNES) in electron energy loss spectroscopy (EELS) allows not only local composition but also local chemistry to be studied. The ability to record nanoanalytical data under computer control as a spectrum image together with processing software has further transformed nanoanalysis.
