ABSTRACT

We have been developing a high energy-resolution electron energy-loss spectroscopy (EELS) microscope to investigate detailed electronic structures by taking spectra from specified small specimen areas and specified small reciprocal space areas. The high energy-resolution EELS based on electron microscopy is becoming more and more important in developing nanometer-scale devices and new functional materials. The construction of our EELS microscope and an application result to boron nitride cones are presented.