Integrated Ferroelectric Microeleetromechanical Systems (MEMS)

EXPERIMENTAL RESULTS A fte r fa b r ic a tio n , low -vo lta ge CM O S dev ices w e re cha ra c te riz e d u s ing H P 4145B Sem iconducto r Param e te r Ana lyze r. Tab le I lis ts typ ica l dev ice pa ram e te rs ob ta ined .