ABSTRACT
The calibration factor, which converts the AFM photodiode output voltage to the cantilever deflection, is generally obtained in the so-called constant compliance regime, where the cantilever is in hard contact with the substrate that is being moved by the piezodrive. Figure 2 shows measurements of the calibration factor (V/nm) as a function of the drive speed (jum/s) for a cantilever in hard contact with the silica substrate. Triangular waveforms for the drive signal were used with constant voltage amplitude and various frequencies. The drive speed was obtained by converting the voltage amplitude to a drive distance using the expansion coefficient obtained by
