ABSTRACT
The interaction between deformable solids, which is derived from physical attractive and repulsive forces, has a close relevance to contact problem, friction and wear of contacting surfaces [1,2]. Larger-scale systems are more influenced by inertia effects, while smaller-scale systems are more influenced by surface effects. In microelectromechanical systems (MEMS) and nanotechnology fields, the adhesion becomes more significant [3]. Developing a sophisticated understanding of adhesion between solid-solid surfaces will help controlling processes such as bonding and debonding [4] that are essential to fabrication of M E M S . It has been known for a long time that the surface roughness is very important in determining the interaction force between the contacting surfaces. Since the actual contacting surfaces are rough, the effect of the roughness will lead to the scenario that the actual contact area occurs at the peaks of the inevitable surface irregularities where the local contact pressure is very high. Furthermore, the details of the distribution of asperities can also affect the adhesion.
