ABSTRACT

Pulsed plasmas have found wide applications both in industry and for basic studies [1-5]. The prime advantages include additional control over the plasma properties by being able to vary the pulse duration, duty cycle, and the repetition frequency. The pulsing parameters are known to provide control over the electron energy distribution function [6] and gas-heating effects can be avoided [7]. Pulsed plasmas have therefore found attractive applications that include generation of metastables [8], radicals [9], and negative ions [10].