ABSTRACT
In this chapter, the ion energy distribution in the plasma source both in the bulk plasma and near the plasma meniscus from where the beam is extracted is studied. Measurements are taken along both the axial and radial directions in the plasma source using ion energy analyzer (IEA) probes. The effect of end-plugging of the multicusp (MC) on ion energy distribution has been investigated. A small quadrupole magnetic filter (QF) is introduced at the extraction end of the MC, and its influence on ion energy spread is investigated. The local dependence of ion energy spread on mass of the ionic species, wave, and neutral pressure has also been looked at. The effect of the geometrical acceptance angle on the IEA probe measurements is discussed.
