ABSTRACT
In this chapter, simulations for designing the beam column of the ME-FIB system are discussed. Widely known and commercially available beam simulation codes, namely, AXCEL-INP and SIMION, are employed for obtaining beam trajectory and emittance. Einzel lenses (ELs) are designed for electrostatic focusing of the ion beam. The effect of various parameters such as electrode geometry, applied extraction voltage, space charge in the beam, shape of the plasma boundary, and so on, on beam optics is looked at. The plasma parameters obtained from previous experiments are used in the simulations. This study has been of immense importance in the design and further fabrication of ion beam optics.
