ABSTRACT
In this chapter, the FIB experiments, including the measurements of beam current, beam profile, and beam spot size, are presented and discussed. The focused beam current is measured using the Faraday cup (NEC-FC 50) and the variation of beam current with electrode potentials and different ion species are studied. In beam profile measurements, two different techniques are employed to intercept the beam: (i) knife edge and (ii) wire, as discussed in Chapter 22. Both the intercepted current by the knife edge and wire and the transmitted current recorded in the Faraday cup are used for the diagnostics. The beam spot size is measured by the micrography of craters formed by the FIB impinging on copper and aluminum substrates.
