ABSTRACT
The impact of microelectromechanical systems (MEMS) on all sectors of manufacturing has been enormous. MEMS are currently in use in car airbags, digital light projectors, ink jet printers, accelerometers in video games, cell phones and digital cameras, and many other consumer and industrial products. There are still, however, no commercial products with MEMS devices that contain contacting, moving parts. The major, unresolved issue is the frictional contact between the silica substrates that are generally used to fabricate MEMS.
