ABSTRACT
Capacitive sensors operate based on changes in electrical capacitance. Capacitive sensors are the most precise of all electrical sensors (including resistive and inductive sensors) and are known for their extremely high sensitivity, high resolution (e.g., 0.01 nm), broad bandwidth (e.g., 1 ~ 100 kHz), robustness, long-term stability and durability, drift-free character, simple structures, low cost, and noncontact detection features. Most capacitive sensors are immune to humidity, temperature, target material, and stray electric field variations. Some can be integrated into a printed circuit board (PCB) or embedded into a microchip or a nanodevice to provide excellent accuracy and nearly infinite resolution, higher reliability, less weight, and lower power consumption.
