ABSTRACT
Nanoresonators are one of the essential members in the family of nanoelectromechanical systems (NEMS). Made of vibrating components with characteristic dimensions in the sub-100 nm regime, nanoresonators present many unique physical characteristics, which are superior to their micro-and macroscale predecessors. For instance, nanoresonators could have their resonance frequencies in the gigahertz range, quality factors (Q-factors) of more than 10,000, and active masses on the order of femtograms (fg, 10−15 g) and even attograms (ag, 10−18 g). These extraordinary properties and features of nanoresonators enable anumber of applications, such as
13.1 Introduction .................................................................................................. 453 13.2 Advances in Nanotube-and Nanowire-Based Nanoresonators .................... 455
13.2.1Capacitive Motion Detection ............................................................ 456 13.2.2Probing Vibration Motion by Atomic Force Microscopy ................. 459 13.2.3Carbon Nanotube Radio ...................................................................460 13.2.4 Sustainable Self-Oscillating Resonator ............................................ 462 13.2.5 Detecting Resonance Motion in Liquid ............................................463 13.2.6Combined Mass and Stiffness Sensing .............................................465 13.2.7Large-Scale Manufacturing of Nanowire Resonators ......................468 13.2.8Dual-Sided Actuated Nanoresonators .............................................. 470 13.2.9 Resonance-Based Detection of Single DNA Molecules ................... 472
13.3 Advances in Graphene-Based Nanoresonators ............................................. 474 13.3.1Fabrication and Actuation of Graphene Resonators ......................... 474 13.3.2Modeling of Graphene Resonators ................................................... 477
13.4Summary ...................................................................................................... 478 Acknowledgments ..................................................................................................480 References ..............................................................................................................480
