ABSTRACT

This chapter will cover mini-solid oxide fuel cells (mSOFCs) and micro-solid oxide fuel cells (μSOFCs). One of the fascinating things about fuel cells is that one can design and build a power-generating system capable of producing from microwatts to the megawatts level. Not only that, it can also be designed and produced in a modular format to achieve the desired electrical output capacity. Figure 4.1 shows the SOFC potential electrical power range from milliwatts to multi-megawatts and its applications spectrum [1]. Ten kilowatts and above is strictly for stationary applications; the 1 to 5 kW range is for transportable and stationary (mainly residential) applications. This chapter discussion will be limited to the 50 mW to 250 W power range, which corresponds to a portable power spectrum. The chapter will cover systems

CONTENTS

4.1 Introduction .................................................................................................. 69 4.2 Single Chamber Micro SOFC ..................................................................... 73

4.2.1 Advancement of Single Chamber Solid Oxide Fuel Cell ........... 74 4.3 Thin Film Based Planar Micro Solid Oxide Fuel Cell ............................ 78

4.3.1 Thin Film Deposition Techniques .................................................80 4.3.2 Fabrication Method of Forming a Free-Standing

Electrolyte on Silicon Wafer ........................................................... 82 4.3.3 Advancements of Planar Micro-SOFC Technology ....................84