ABSTRACT
As foretold by Professor Taniguchi some 20 years ago [1], lasers have emerged as a primary energy source for material/phase transformation, removal, or addition in manufacturing processes to realize atomic-scale precisions and nanometric scale features, such as lms, tubes, wires, honeycomb, as well as various macromolecular structures [2]. Nanomanufacturing is a process of using precision machines that can generate precision tool motions to fabricate designed surface forms/dimensions with nanometric tolerance [3].
