ABSTRACT
This review of hydrogen begins with a survey of the fundamental properties of H in Si and Ge: diffusivity, solubility, equilibrium sites, electrical activity, and vibrational properties. Hydrogen is best known for its ability to change the electrical properties in semiconductors by forming covalent bonds with defects or with host atoms adjacent to them. This affects the position of the electrically active levels
7.1 Introduction .................................................................................................. 217 7.2 Interstitial Hydrogen ..................................................................................... 219
7.2.1 Diffusivity and Solubility of H in Si and Ge .................................... 219 7.2.2 Congurations and Electrical Activity of H in Defect-Free
Si and Ge...........................................................................................220 7.2.2.1 Silicon ................................................................................220 7.2.2.2 Germanium ........................................................................ 223 7.2.2.3 Open Questions: Diffusion Properties of H0 and H− .........224
