ABSTRACT

Yong Qing Fu, J. K. Luo, A. J. Flewitt, A. J. Walton, M. P. Y. Desmulliez, and W. I. Milne

CONTENTS

Introduction .................................................................................................................................336 Acoustic Wave Biosensors .........................................................................................................336 Acoustic Wave-Based Micro£uidics .........................................................................................340 Selection of Bulk Materials or Thin Films................................................................................ 341 Requirement for ZnO or AlN Films for Sensing and Micro£uidic Applications ..............343 ZnO Film ......................................................................................................................................344