ABSTRACT
Plasma is considered to be the fourth distinct state of matter. It can broadly be dened as a gas containing charged and neutral species, including electrons, ions, radicals, atoms, and molecules. The presence of charge carriers makes the plasma electrically conductive. Depending on the method of plasma generation, it reaches temperatures between 1 and 10 eV, electron densities from 103 to 1012 cm-3, and degrees of ionization from 10-6 to 0.3. In the eld of surface modication, only cold (no equilibrium) plasma is used. Its degree of ionization is very low (below 10-4) and the thermal motion of the ions can be ignored. Hence, such plasmas offer very good conditions
7.1 Introduction .................................................................................................. 179 7.2 Plasma Modication ..................................................................................... 180
7.2.1 Plasma Used for Cleaning and Etching of Membranes .................... 181 7.2.2 Modication of Membranes in Plasma of Nonpolymerizing Gases .....183
