ABSTRACT

Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology focuses on nanotechnology and the science behind it, including solid-state physics. It provides a clear understanding of the electronic, mechanical, and optical properties of solids relied on in integra

chapter |3 pages

Introduction

chapter 2|38 pages

Crystallography

chapter 4|84 pages

Silicon Single Crystal Is Still King

chapter 5|136 pages

Photonics

chapter 6|82 pages

Fluidics