ABSTRACT
CONTENTS 4.1 Introduction .................................................................................................. 94 4.2 Overview of NIL Technology .................................................................... 95
4.2.1 NIL Process ...................................................................................... 95 4.2.2 Polymer Flow during NIL............................................................. 97 4.2.3 Biocompatibility of the Resist ..................................................... 100 4.2.4 Stamps with Nanostructures....................................................... 101 4.2.5 Antiadhesive Layer Coating........................................................ 102
4.3 NIL in Biological Applications ................................................................ 103 4.3.1 Nanofluidic Devices...................................................................... 103 4.3.2 Engineering Nanopores ............................................................... 105 4.3.3 Chemical Nanopatterning ........................................................... 107 4.3.4 Protein Nanopatterning ............................................................... 109
4.4 Outlook.........................................................................................................111 Acknowledgment................................................................................................ 112 References ..............................................................................................112
