ABSTRACT
MEMS (Microelectromechanical systems) technologies make it possible to construct sensors and actuators on the micron scale, using micromachining technologies that are derived from semiconductor process technologies [Motamedi, 1994]. In the 1970s integrated sensors that incorporated driving circuitry were first developed from the semiconductor processes. In the early 1980s micromechanical components such as the spring, cantilever, and bridge were developed. In the late 1980s micromechanical components separated from the substrate were developed; examples include micro tweezers, micro motors, and micro gears. The 1990s witnessed the integration of logic circuits with actuators and sensors.
