ABSTRACT
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In recent years, there has been significant interest in the material properties and behaviors of
nano-and bio-systems relevant to microelectronics and biomedical applications. Soft materials
are beginning to play an increasingly important role in this field, especially in the bio-microelec-
tromechanical systems (bioMEMS) area. Some disadvantages of silicon, such as high cost and
stiffness, have begun to limit its applications in bioMEMS. Therefore, although people have been
successful in making silicon based valves and microfluidic bioMEMS devices, alternative fabri-
cation techniques using nontraditional soft materials, including hydrogels [1], plastics, and
elastomers [2,3], are becoming more popular. Besides, compact, lightweight, and flexible implan-
table bioMEMS are more desirable for decreasing discomfort in patients. Ideally, those devices
should be almost unnoticeable to the patient, much the same as our nerves are integrated into our
tissues. Figure 2.1a and b show bioMEMS fluidic devices, made of silicon and polydimethylsi-
loxane (PDMS), respectively.
