chapter  6
46 Pages

RF/Microwave MEMS Phase Shifter

Note that design of MEMS phase shifters involves MEMS bridges, metalinsulator-metal (MIM) capacitances, MEMS switches, MEMS capacitors, 3 dB CPW couplers, unloaded inductances and capacitances, and transmission-line segments. MEMS phase shifters make massive use of CPW transmissionline technology [1]. Therefore, it is appropriate to provide useful information on the relevant parameters of the CPW transmission lines, namely, the characteristic impedance (Z0), center conductor width (W ), and thickness (t) of the CPW transmission line, and substrate thickness as a function of frequency and dielectric constant of substrate deployed.