chapter  8
50 Pages

Miscellaneous MEMS/Nanotechnology Devices and Sensors for Commercial and Military Applications

Smart materials, which have potential applications in fabrication ofMEMS-based and NT-based sensors or devices, are discussed with emphasis on their thermal, mechanical, electrical, and dielectric properties. Smart materials best suited for commercial, medical, aerospace, military, and satellite applications will be identified. Applications of nanowires (NWs), nanotubes, nanocrystals, and nanorods are briefly described.