chapter  1
40 Pages

Highlights and Chronological Developmental History of MEMS Devices Involving Nanotechnology

It is important to mention that MEMS devices are best suited for applications, where low-power consumption, minimum weight and size, high reliability, and reconfigurability are the principal requirements. It is important to mention that communications satellites will be the principal beneficiaries from the MEMS technology [1] because they offer global wireless connectivity, as illustrated in Figure 1.1.