chapter  2
56 Pages

Potential Actuation Mechanisms, Their Performance Capabilities, and Applications

Critical elements or components of each actuation mechanism are identified and their structural requirements are briefly described. Performance capabilities of each actuation mechanism are summarized with emphasis on reliability, response time, actuation voltage, input power, and output force generated by the armature or cantilever beam structure. Potential applications of each actuation mechanism are identified in commercial, industrial, military, space, and clinical MEMS-based systems.