ABSTRACT
Another case is starting a new manufacturing, in which LCVD could be used in competition with other conventional processes.
In this case, the obvious advantage is the elimination of polluting and/or hazardous processes. However, the greatest benefit of making a process environmentally benign is intangible. Keeping this great intangible benefit in mind, it is possible to compare tangible advantages in the cost of materials involved and the possible reduction of steps in the overall manufacturing process. As described in Chapter 32, LCVD process can be added by piggybacking on the ion vapor deposition (IVD) process, meaning that there is no need of separate equipment for LCVD. Figure 36.1 compares the steps involved in the current IVD process and IVD/LCVD hybrid process.
