ABSTRACT
When the second gas, which cannot deposit material but can participate in material deposition from TMS, is added to a TMS flow system, both the IG and the DG appear at the onset of discharge. Figure 4.7 depicts the initial glow of (TMS 1 sccm þ O2 4 sccm), which clearly shows the DG of TMS and the IG of O2 in different colors. The shape of glow did not change with discharge time in this case. However, the color of the IG changed from gold-white in the beginning to blue-white in few seconds (about 10 s) and remained essentially the same color during the remainder of 2-min discharge time. The color of the DG didn’t change.
