ABSTRACT
Because the pressure before glow discharge initiation does not determine the pressure under a glow discharge, it is important to find the factors that determine this parameter. As far as the gas phase is concerned, the plasma polymerization in a closed system can be described as
n! gn ð12:2Þ
where n is the number of gas molecules. If we assume that the same reaction occurs in a flow system, Eq. (12.2) can be written as
dn=dt! gdn=dt ð12:3Þ
Thus, in a flow system, LCVD is visualized as a process that changes the flow rate of gas.
