ABSTRACT
TMS deposition rate profiles on floating substrate in DC, 40-kHz, and 13.56-MHz discharges are shown in Figure 13.3, in which the scale of deposition rate is 0-300, whereas that in Figure 13.2 is 0-1400. The deposition rate on floating substrate is smaller than that on electrode in all cases, but uniform deposition occurs on the substrate. In DC discharge, there is a significant difference in the deposition rate on the surface facing the cathode and that on the surface facing the anode. This difference is proof that the cathodic polymerization prevails in DC discharge, and the distance from the cathode is a factor that controls the deposition onto substrate placed in gas phase.
